Single-step synthesis process of Ti3SiC2 ohmic contacts on 4H-SiC by sputter-deposition of Ti

نویسندگان

  • Hossein Fashandi
  • Mike Andersson
  • Johan Eriksson
  • Jun Lu
  • K. Smedfors
  • C. -M Zetterling
  • Anita Lloyd Spetz
  • Per Eklund
  • H. Fashandi
  • J. Eriksson
  • J. Lu
  • A. Lloyd Spetz
چکیده

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تاریخ انتشار 2015